Semiconductor substrates
Lapping and polishing monocrystalline and polycrystalline silicon wafers, plus compound semiconductors such as gallium arsenide and indium phosphide. Tabular alumina slides parallel to the wafer instead of rolling, so surfaces stay free of random scratching.
- Wafer yield
- typically above 96%
- Yield gain vs. equiaxed abrasive
- 10–15%


